Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect

Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons

A. V. Phelps, Zoran Petrović · Plasma Sources Science and Technology · 1999 · 891 citations

Natural Sciences, Materials Science, Electronic Materials +15

Review of inductively coupled plasmas for plasma processing

Jeffrey Hopwood · Plasma Sources Science and Technology · 1992 · 678 citations

Natural Sciences, Electrical Engineering, Physics +17

Physics of Radio-Frequency Plasmas

Pascal Chabert, Nicholas Braithwaite · Cambridge University Press eBooks · 2011 · 632 citations

Natural Sciences, Electrical Engineering, Physics +13

Analytical solution for capacitive RF sheath

M. A. Lieberman · IEEE Transactions on Plasma Science · 1988 · 548 citations

Engineering, Electrical Engineering, Circuit Theory +14

Standing wave and skin effects in large-area, high-frequency capacitive discharges

M. A. Lieberman, Jean‐Paul Booth, Pascal Chabert et al. · Plasma Sources Science and Technology · 2002 · 359 citations

Natural Sciences, Electrical Engineering, Physics +17