Concepedia

Properties of heteroepitaxial 3C-SiC films grown by LPCVD

Yoh-ichi Yamaguchi, Hiroyuki Nagasawa, Tsutomu Shoki, Norimichi Annaka, Hideaki Mitsui

Sensors and Actuators A Physical · 1996 · 10 citations · 4 references

DOI

Concepts

References

4

Mechanical properties of 3C silicon carbide

Lijun Tong, Mehran Mehregany, L. G. Matus · Applied Physics Letters · 1992 · 130 citations · Full text

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Atomic level epitaxy of 3C-SiC by low pressure vapour deposition with alternating gas supply

Hiroyuki Nagasawa, Yuta Yamaguchi · Thin Solid Films · 1993 · 68 citations

, , +16

SiC mask membrane for synchrotron radiation lithography

Masaaki Kobayashi, Mitsuru Sugawara, Kazuhide Yamashiro et al. · Microelectronic Engineering · 1990 · 17 citations

, , +9

Properties Of SiC Film As X-Ray Mask Membrane

Yoh-ichi Yamaguchi, Norimichi Annaka, Tsutomu Shoki et al. · MRS Proceedings · 1993 · 11 citations

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