Publication | Closed Access
Structural characterization and thermal oxidation resistance of silicon oxycarbides produced by polysiloxane pyrolysis
60
Citations
33
References
2004
Year
Materials SciencePolysiloxane PyrolysisChemical EngineeringEngineeringThermal Oxidation ResistanceOxidation ResistanceSemiconductor Device FabricationChemistrySilicon On InsulatorSilicon Oxycarbides
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