Dual Servo Control of a High-Tilt 3-DOF Microparallel Positioning Platform

Abstract

This paper presents a precise positioning control of a microparallel positioning platform using a dual-stage servo system. The result of the research can be applied to dual-stage-type parallel machines for improving the positioning accuracy. The proposed platform adopts a dual-stage system that consists of three coarse actuators and three fine actuators to realize 3 degrees of freedom (DOF) motion. The 3-DOF motion of the end-effector is measured by a set of three linear sensors. Dynamic models for the coarse and fine actuators are derived by the system identification approach. The gain-scheduled multi-input multi-output (MIMO) controllers are synthesized based on the modeling. The MIMO controller is designed with a mixed-sensitivity criterion on tracking performance and positioning capability, and the design of the gain scheduler is based on the kinematics change. By integrating the controllers for two kinds of actuators, a dual servo controller can be developed based on the master-slave with decoupling structure. An antiwindup controller and a feedforward compensator are adopted to improve the performance. The successful performance of the synthesized dual servo controller is validated through experiments on tracking to guarantee submicrometer accuracy.