A gyroscope array with linked-beam structure

Abstract

This paper presents a gyroscope array with linked-beam structure. The proposed gyroscope was fabricated by surface micromachining technology with 15 /spl mu/m-thick polycrystalline silicon. A dichloro-dimethylsilane (DDMS, (CH/sub 3/)/sub 2/SiCl/sub 2/) grafting as a new anti-stiction method was used to release up to a 9-cell gyroscope array. This paper analyzes the feasibility of the gyroscope array with capacitive inertial sensing as a high performance gyroscope with respect to thermal and rotational noise. The fabricated quad-cell gyroscope shows that the electrical noise equivalent rate is about 0.01 deg/sec, sensitivity is 93 mV/deg/sec, and its dynamic range is 100 deg/sec.