A hybrid sequential deposition fabrication technique for micro fuel cells

Abstract

Micro fuel cell systems have elicited significant interest due to their promise for instantly rechargeable, longer duration and portable power. Most micro fuel cell systems are either built as miniaturized plate-and-frame or silicon-based microelectromechanical systems (MEMS). Plate-and-frame systems are difficult to fabricate smaller than 20 cm3. Existing micro fuel cell designs cannot meet the cost, scale and power requirements of some portable power markets. Traditional MEMS scaling advantages do not apply to fuel cells because the minimum area for the fuel cell is fixed by the catalyst area required for a given power output, and minimum volume set by mass transport limitations. We have developed a new hybrid technique that borrows from both micro and macro machining techniques to create fuel cells in the 1–20 cm3 range, suitable for cell phones, PDAs and smaller devices.