COUPLING ELECTRON-BEAM PROBING WITH KNOWLEDGE-BASED FAULT LOCALIZATION

Abstract

The authors deal with prototype validation of VLSI circuits. Circuits are observed using electron-beam probing used in voltage contrast mode, in such a way that gray-level images are obtained and processed in order to determine potential values of connexions. These values are compared against reference values, issued from fault-free simulation of the device under test. The list of discrepancies resulting from comparison constitutes input for a fault localization process done using a knowledge-based system. The reasons for the choice for such an approach are explained, and the approach itself is described, as well as its implementation and the obtained results.