VHF Plasma Deposition: A Comparative Overview - Concepedia

Concepedia

Publication | Closed Access

VHF Plasma Deposition: A Comparative Overview

49

Citations

27

References

1992

Year

A. Shah, Joydeep Dutta, N. Wyrsch, K. Prasad, H. Curtins, F. Finger, A.A. Howling, Ch. Hollenstein

MRS Proceedings

Electrical EngineeringEngineeringMagnetohydrodynamicsCosmic RayComputational ElectromagneticsVhf Plasma DepositionPlasma ApplicationPlasma Processing

References

	Year	Citations

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