Statistics
Publications
84
Citations
7.8K
H-Index
47
Active since
1973
Affiliations
Palo Alto Research Center(Current)
D. K. Biegelsen is an author at Palo Alto Research Center specializing in materials science, natural sciences, and semiconductor materials.
Publications per year
1973–2017
84
84
Self-limiting oxidation for fabricating sub-5 nm silicon nanowires
H. I. Liu, D. K. Biegelsen, F. A. Ponce et al. · Applied Physics Letters · 1994 · 287 citations
1–5 of 84