A thermal bimorph micromirror with large bi-directional and vertical actuation

Optical Coherence Tomography

David Huang, Eric A. Swanson, Charles P. Lin et al. · Science · 1991 · 13.7K citations

Engineering, Biomedical Engineering, Ophthalmology +16

A MEMS-based projection display

Peter F. Van Kessel, Larry J. Hornbeck, Reto Meier et al. · Proceedings of the IEEE · 1998 · 614 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Micromachined scanning confocal optical microscope

David L. Dickensheets, G. S. Kino · Optics Letters · 1996 · 204 citations

Natural Sciences, Physics, Microfabrication +13

Post-CMOS processing for high-aspect-ratio integrated silicon microstructures

Huikai Xie, Lars Erdmann, Xu Zhu et al. · Journal of Microelectromechanical Systems · 2002 · 167 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

A Two-Axis Electrothermal Micromirror for Endoscopic Optical Coherence Tomography

Ankur Jain, Anthony Kopa, Yingtian Pan et al. · IEEE Journal of Selected Topics in Quantum Electronics · 2004 · 142 citations

Engineering, Biomedical Engineering, Biomedical Optics +12