A Two-Axis Electrothermal Micromirror for Endoscopic Optical Coherence Tomography

Abstract

This paper reports a 1-mm/sup 2/, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40/spl deg/), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4/spl times/4 pixel display using this two-dimensional micromirror device has been demonstrated.