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Heteroepitaxial Growth and Characteristics of 3C-SiC on Large-Diameter Si(001) Substrates
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2002
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Materials EngineeringMaterials ScienceEngineeringApplied PhysicsHeteroepitaxial GrowthSemiconductor Device FabricationSilicon On InsulatorEpitaxial GrowthCarbide
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