High-Voltage Diamond Vertical Schottky rectifiers

Abstract

We have designed, simulated and experimentally demonstrated high-voltage vertical diamond Schottky rectifiers. The rectifiers were fabricated on free-standing homo-epi films with remarkably low p-type doping using a lift-off process. Theoretical calculations have been performed to determine the thickness and doping concentration of the drift region. Devices with 20mum epi layer have been shown to block 3.7kV and conduct 0.6 A/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> at 20V forward drop at 290degC. A very low hole mobility or doping concentration and a Schottky barrier height of 0.26eV have been estimated