Motorola MEMS switch technology for high frequency applications

Abstract

Motorola Semiconductor Products Sector (SPS) has made significant progress in developing an integrated MEMS switch network for use in next-generation portable wireless systems. This MEMS switch technology has significantly better RF characteristics than conventional PIN diodes or FET switches and consumes less power. The RF MEMS switch exhibits insertion loss under 0.3 dB, isolation greater than 50 dB, and operating power under 200 /spl mu/W. The RF MEMS switch chip is integrated with a high voltage charge pump plus control logic chips into a single package that provides a network system to accommodate low voltage requirements in portable wireless applications.