Planarization of diamond thin film surfaces by ion beam etching at grazing incidence angle

Tridyn-binary collision simulation of atomic collisions and dynamic composition changes in solids

W. Möller, W. Eckstein, J.P. Biersack · Computer Physics Communications · 1988 · 607 citations

Natural Sciences, Materials Science, Physics +16

Ion-beam-assisted etching of diamond

N. N. Efremow, M. W. Geis, D. C. Flanders et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 103 citations

Engineering, Materials Engineering, Materials Science +11

Etching of diamond with argon and oxygen ion beams

Timothy J. Whetten, Angela A. Armstead, Thomas A. Grzybowski et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 83 citations

Natural Sciences, Materials Science, Physics +12

Characterization and growth mechanisms of boron nitride films synthesized by ion-beam-assisted deposition

O. Burat, D. Bouchier, Valérie Stambouli et al. · Journal of Applied Physics · 1990 · 63 citations

Natural Sciences, Materials Engineering, Materials Science +13

Diamond deposition in a bell-jar reactor: influence of the plasma and substrate parameters on the microstructure and growth rate

A. Gicquel, E. Anger, M. F. Ravet et al. · Diamond and Related Materials · 1993 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +5