Publication | Closed Access
Planarization of diamond thin film surfaces by ion beam etching at grazing incidence angle
23
Citations
5
References
1996
Year
Materials EngineeringMaterials ScienceDiamond-like CarbonEngineeringElectron-beam LithographyPhysicsMicrofabricationBeam LithographySurface ScienceApplied PhysicsIon BeamIncidence AngleMicroelectronicsPlasma EtchingNanolithography Method
| Year | Citations | |
|---|---|---|
Page 1
Page 1