2002 · 43 citations · 5 references
EngineeringElectrical EngineeringMechanical EngineeringActuatorsFinite Element AnalysisMicroelectromechanical SystemsActuation SystemsActuator ControlActuator SystemsElectromechanical SystemsElectrostatic ActuationElectrostatic ActuatorsCapacitive Displacement SensingDisplacement SensingElectromechanical ModelingFeedback Control Of Electrostatic ActuatorsMicroactuatorsMicroelectromechanical ActuatorsModeling Of Electrostatic ActuatorsSimulation Of Electrostatic Actuators
A micro actuator that is called a distributed electrostatic actuator, because it consists of many driving units, and that is driven by electrostatic force is described. Each driving unit has wavelike electrodes, which are insulated and pull each other by the electrostatic force. The deformation of this actuator depends on the electrostatic force, the elasticity of the structure, and the external force. The motion of the actuator was analyzed with the finite-element method (FEM), and a macro model of the actuator was fabricated to verify its motion. It was confirmed that the actuator's apparent compliance can be controlled by a feedback control system using capacitive displacement sensing and electrostatic driving.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
5
IC-processed electrostatic micromotors
Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations
Microrobots and micromechanical systems
William S. Trimmer · Sensors and Actuators · 1989 · 410 citations
Engineering, Mechanical Engineering, Robotics Engineering +12
Distributed electrostatic micro actuator
M. Yamaguchi, S. Kawamura, Kazuyuki MINAMI et al. · 2002 · 43 citations
Engineering, Electrical Engineering, Mechanical Engineering +17
Sub-micron gaps without sub-micron etching
T. Furuhata, Toshiki Hirano, K.J. Gabriel et al. · 2002 · 18 citations