Concepedia

Author

T. Furuhata

IBM Research - Tokyo

Also Known As

T. Furuhata, Tomotake Furuhata, Tomotake Furuhata Tomotake Furuhata

14

Publications

353

Citations

8

H-Index

36

Concepts

All Affiliations

IBM Research - TokyoThe University of TokyoTokyo University of ScienceAT&T (United States)
TF

About

T. Furuhata is an author at IBM Research - Tokyo specializing in microfabrication, engineering, and mechanical engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

8

8

345

2

Electrical Engineering

5

5

274

3

Applied Physics

3

3

204

4

Medicine

1

1

45

5

Materials Engineering

1

1

11

T. Furuhata

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8

Publications

345

Citations

8

H-Index

YearCitations

Design, fabrication, and operation of submicron gap comb-drive microactuators

Toshiki Hirano, T. Furuhata, K.J. Gabriel,

Journal of Microelectromechanical Systems

1992

175

An integrated lateral tunneling unit

Daisuke Kobayashi, Toshiki Hirano, T. Furuhata,

1992

45

Array-driven ultrasonic microactuators

T. Furuhata, Toshiki Hirano, Hiroyuki Fujita

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

2002

32

Operation of sub-micron gap electrostatic comb-drive actuators

Toshiki Hirano, T. Furuhata, K.J. Gabriel,

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

2002

25

Outer rotor surface-micromachined wobble micromotor

T. Furuhata, Toshiki Hirano, L.H. Lane,

2002

22

Sub-micron gaps without sub-micron etching

T. Furuhata, Toshiki Hirano, K.J. Gabriel,

2002

18

Dry releasing of electroplated rotational and overhanging structures

Toshiki Hirano, T. Furuhata, Hiroyuki Fujita

2002

17

Electroplated and Dry-Released Metallic Microstructures for a Lateral Tunneling Unit Application

Toshiki Hirano, Dai Kobayashi Dai Kobayashi, T. Furuhata,

Japanese Journal of Applied Physics

1994

11

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