Concepedia

T. Furuhata

TF

8

Publications

345

Citations

8

H-Index

1992

Active since

Affiliations

IBM Research - Tokyo(Current)

The University of Tokyo

Tokyo University of Science

AT&T (United States)

T. Furuhata is an author at IBM Research - Tokyo specializing in microfabrication, engineering, and mechanical engineering.

Top concepts

EngineeringMicrofabricationMechanical EngineeringMicroelectronicsElectrical EngineeringMechanical DesignMechatronicsApplied PhysicsMicropositioningMechanical Systems

Publications per year

1992–2002

8

Publications

8

Design, fabrication, and operation of submicron gap comb-drive microactuators

Toshiki Hirano, T. Furuhata, K.J. Gabriel et al. · Journal of Microelectromechanical Systems · 1992 · 175 citations

Electrical Engineering, Engineering, Submicron Gaps +8

An integrated lateral tunneling unit

Daisuke Kobayashi, Toshiki Hirano, T. Furuhata et al. · 1992 · 45 citations

Engineering, Microscopy, Mechanical Engineering +25

Array-driven ultrasonic microactuators

T. Furuhata, Toshiki Hirano, Hiroyuki Fujita · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 32 citations

Array-driven Ultrasonic Microactuators, Engineering, Array-driven Ultrasonic Microactuator +15

Operation of sub-micron gap electrostatic comb-drive actuators

Toshiki Hirano, T. Furuhata, K.J. Gabriel et al. · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 25 citations

Electrical Engineering, Drive Electrodes, Maximum Displacements +9

Outer rotor surface-micromachined wobble micromotor

T. Furuhata, Toshiki Hirano, L.H. Lane et al. · 2002 · 22 citations

Electrostatic Wobble Micromotor, Stator Fabrication, Engineering +13

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