Low-cost uncooled infrared detectors in CMOS process

Laminated high-aspect-ratio microstructures in a conventional CMOS process

Gary K. Fedder, S. Santhanam, Michael L. Reed et al. · Sensors and Actuators A Physical · 1996 · 249 citations

Engineering, Electrical Engineering, Materials Science +17

Uncooled thermal imaging with monolithic silicon focal planes

Roger Wood · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 161 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Characterization and optimization of infrared poly SiGe bolometers

Sherif Sedky, Paolo Fiorini, Kris Baert et al. · IEEE Transactions on Electron Devices · 1999 · 147 citations

Natural Sciences, Electrical Engineering, Materials Science +12

A new approach for the fabrication of micromechanical structures

M. Parameswaran, H. Baltes, Lj. Ristic et al. · Sensors and Actuators · 1989 · 128 citations

Engineering, Materials Science, Mechanical Engineering +14

Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array

A. Schaufelbühl, N. Schneeberger, U. Münch et al. · Journal of Microelectromechanical Systems · 2001 · 96 citations

Engineering, Electrical Engineering, Heat Transfer +16