Ion beam imprinting system for nanofabrication

Ion-beam sculpting at nanometre length scales

Jiali Li, Derek Stein, Ciaran J. McMullan et al. · Nature · 2001 · 1.7K citations · Full text

Engineering, Materials Science, Nanomaterials +9

Formation of a few nanometer wide holes in membranes with a dual beam focused ion beam system

T. Schenkel, Velimir Radmilović, E.A. Stach et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +12

Rf driven multicusp ion source for pulsed or steady-state ion beam production

K. N. Leung, D.A. Bachman, Paul R. Herz et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 24 citations

Natural Sciences, Nuclear Engineering, Physics +8

Resolution improvement for a maskless microion beam reduction lithography system

Ximan Jiang, Qing Ji, Lili Ji et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 16 citations

Engineering, Manufacturing Engineering, Microelectromechanical Systems +12

Combined electron- and ion-beam imprinter and its applications

Qing Ji, Lili Ji, Ye Chen et al. · Applied Physics Letters · 2004 · 11 citations

Engineering, Physics, Microelectronics +11