Concepedia

Phase transition and microstructure change in Ta–Zr alloy films by co-sputtering

Z.Z. Tang, J.H. Hsieh, Sam Zhang, Chuan Li, Yongqing Fu

Surface and Coatings Technology · 2004 · 23 citations · 12 references

DOI

Concepts

References

12

Metastable alloy phases by co-sputtering

B. Cantor, R.W. Cahn · Acta Metallurgica · 1976 · 98 citations

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The thermodynamics of amorphous phases in immiscible systems: The example of sputter-deposited Nb–Cu alloys

C. Michaelsen, C. Gente, R. Bormann · Journal of Applied Physics · 1997 · 65 citations

, , +17

Phase stability of bcc Zr in Nb/Zr thin film multilayers

Gregory B. Thompson, Rajarshi Banerjee, S.A. Dregia et al. · Acta Materialia · 2003 · 56 citations

, , +10

Correlation of electrical resistivity and grain size in sputtered titanium films

M. E. Day, M. Delfino, J. A. Fair et al. · Thin Solid Films · 1995 · 54 citations

, , +16

Study of Ta–Si–N thin films for use as barrier layer in copper metallizations

D. Fischer, T. Scherg, Jan Bauer et al. · Microelectronic Engineering · 2000 · 47 citations

, , +14