M. E. Day - Concepedia

Author

M. E. Day

Also Known As

M. Day, M. E. Day, M.E. Day, Mary E. Day

Publications

247

Citations

H-Index

Concepts

All Affiliations

M. E. Day is an author at Varian Medical Systems (United States) specializing in microelectronics, engineering, and electrical engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	116
2	Electrical Engineering	4	4	97
3	Applied Physics	3	3	79
4	Chemical Engineering	1	1	19
5	Chemistry	1	1	19

M. E. Day

Publications

170

Citations

H-Index

Page 1

	Year	Citations
Correlation of electrical resistivity and grain size in sputtered titanium films M. E. Day, M. Delfino, J. A. Fair, Thin Solid Films	1995	54
Dry etching of via connections for GaAs monolithic microwave integrated circuits fabrication S. Salimian, C. B. Cooper, M. E. Day Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena EngineeringIntegrated CircuitsCircuits FabricationInterconnect (Integrated Circuits)Wafer Scale Processing	1987	33
Low energy ion etching of aluminum oxide films and native aluminum oxide M. E. Day, M. Delfino, S. Salimian Journal of Applied Physics Aluminium NitrideEngineeringArgon Ion EnergiesSource Argon PlasmaVacuum Device	1992	27
A 2-20 GHz High-Gain Monolithic HEMT Distributed Amplifier S. Bandy, C. Nishimoto, C. Yuen, IEEE Transactions on Microwave Theory and Techniques Electrical EngineeringEngineeringRf SemiconductorRecord Performance IevelHigh-frequency Device	1987	26
Correlation of plasma and surface chemistry during electron cyclotron resonance hydrogen etching of native silicon oxide W. Tsai, M. Delfino, M. E. Day, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials ScienceChemical EngineeringEngineeringSurface ChemistryNanoelectronics	1993	19
High-gain, low-noise monolithic HEMT distributed amplifiers up to 60 GHz C. Yuen, C. Nishimoto, Y.C. Pao, IEEE Transactions on Microwave Theory and Techniques Electrical EngineeringChip SizeCutoff FrequenciesEngineeringRf Semiconductor	1990	11

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