M. E. Day

Correlation of electrical resistivity and grain size in sputtered titanium films

M. E. Day, M. Delfino, J. A. Fair et al. · Thin Solid Films · 1995 · 54 citations

Dry etching of via connections for GaAs monolithic microwave integrated circuits fabrication

S. Salimian, C. B. Cooper, M. E. Day · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 33 citations

Engineering, Integrated Circuits, Circuits Fabrication +16

Low energy ion etching of aluminum oxide films and native aluminum oxide

M. E. Day, M. Delfino, S. Salimian · Journal of Applied Physics · 1992 · 27 citations

Aluminium Nitride, Engineering, Argon Ion Energies +18

A 2-20 GHz High-Gain Monolithic HEMT Distributed Amplifier

S. Bandy, C. Nishimoto, C. Yuen et al. · IEEE Transactions on Microwave Theory and Techniques · 1987 · 26 citations

Electrical Engineering, Engineering, Rf Semiconductor +8

Correlation of plasma and surface chemistry during electron cyclotron resonance hydrogen etching of native silicon oxide

W. Tsai, M. Delfino, M. E. Day et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 19 citations

Materials Science, Chemical Engineering, Engineering +15