Chemical Engineering & Technology · 2005 · 35 citations · 2 references
EngineeringMaterials EngineeringMaterials ScienceManufacturing ProcessesMaterials ProcessingMicrofabricationGlass MaterialsMems FabricationMicrofabrication MaterialsMicrofabrication ProcessesMicromachiningMicrostructure ControlGlass Microfluidic Device FabricationGlass Microfluidic FabricationMicroreactor DesignMicroreactor TechnologyMicroreactors
Abstract For centuries, glass has been a very well‐known material. Even today new interesting applications are discovered. As described in the paper below, micro process engineering enables new approaches in the development and production of chemical compounds. Since there are many examples of aggressive chemicals which have to be handled, an inert material such as glass is of great interest.
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Fabrication technologies for microsystems utilizing photoetchable glass
T. Dietrich, W. Ehrfeld, M. Lacher et al. · Microelectronic Engineering · 1996 · 155 citations