Statistics
Publications
14
Citations
550
H-Index
13
Active since
1989
T. Dietrich is an author at Fraunhofer Institute for Microengineering and Microsystems specializing in materials science, materials engineering, and engineering.
Publications per year
1989–2023
14
14
Fabrication technologies for microsystems utilizing photoetchable glass
T. Dietrich, W. Ehrfeld, M. Lacher et al. · Microelectronic Engineering · 1996 · 155 citations
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