M. Lacher

Fabrication technologies for microsystems utilizing photoetchable glass

T. Dietrich, W. Ehrfeld, M. Lacher et al. · Microelectronic Engineering · 1996 · 154 citations

Materials Science, Engineering, Microfabrication +6

Specific bio-recognition reactions observed with an integrated Mach–Zehnder interferometer

Michael Weisser, Günter E. M. Tovar, Silvia Mittler‐Neher et al. · Biosensors and Bioelectronics · 1999 · 96 citations

Engineering, Analytical Instrumentation, Biosensing Systems +8

A label-free affinity sensor with compensation of unspecific protein interaction by a highly sensitive integrated optical Mach–Zehnder interferometer on silicon

Franz Brosinger, H. Freimuth, M. Lacher et al. · Sensors and Actuators B Chemical · 1997 · 92 citations

Photonics, Photonic Sensor, Engineering +11

<title>Micromolding: a powerful tool for large-scale production of precise microstructures</title>

Lutz Weber, W. Ehrfeld, H. Freimuth et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 66 citations

Engineering, Mechanical Engineering, Micromanufacturing +19

<i>μ</i>-biomimetic flow-sensors—introducing light-guiding PDMS structures into MEMS

Hendrik Herzog, Adrian Klein, Horst Bleckmann et al. · Bioinspiration & Biomimetics · 2015 · 40 citations