IEEE Transactions on Electron Devices · 1996 · 244 citations · 51 references
Electrical EngineeringEngineeringTechnology ScalingData ConverterCmos TechnologiesCmos ImagersMixed-signal Integrated CircuitImage ProcessorComputer EngineeringCmos TechnologyDevice Scaling ConsiderationsInstrumentationSla RoadmapMicroelectronicsBeyond CmosImage Sensor
This paper analyzes how device and technology scaling affect active pixel CMOS image sensors and outlines the challenges facing the CMOS imager research community. The authors use the SLA roadmap to calculate device characteristics relevant to CMOS imager performance and analyze how scaling affects the analog circuit performance, highlighting where standard CMOS technologies may need to depart. The analysis indicates that standard CMOS can meet 2‑1 μm imaging needs without process changes, but achieving good quality imaging at 0.5 μm and beyond requires fabrication process modifications and pixel architecture innovations.
This paper presents an analysis of the impact of device and technology scaling on active pixel CMOS image sensors. Using the SLA roadmap as a guideline, we calculate the device characteristics that are germane to the image sensing performance of CMOS imagers, and highlight the areas where the CIMOS imager technology may need to depart from "standard" CMOS technologies. The impact of scaling on those analog circuit performance that pertain to image sensing performances are analyzed. Our analyses suggest that while "standard" CMOS technologies may provide adequate imaging performance at the 2-1 /spl mu/m generation without any process change, some modifications to the fabrication process and innovations of the pixel architecture are needed to enable CMOS to perform good quality imaging at the 0.5 /spl mu/m technology generation and beyond. Finally, the challenges to the CMOS imager research community are outlined.
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Design of ion-implanted MOSFET's with very small physical dimensions
R.H. Dennard, F.H. Gaensslen, Hwa-Nien Yu et al. · IEEE Journal of Solid-State Circuits · 1974 · 3.4K citations