Concepedia

Properties Of Heteroepitaxial 3c-SiC Films Grown by LPCVD

Yuta Yamaguchi, Hiroyuki Nagasawa, Tsutomu Shoki, Norimichi Annaka

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 11 citations · 4 references

DOI

Concepts

References

4

Mechanical properties of 3C silicon carbide

Lijun Tong, Mehran Mehregany, L. G. Matus · Applied Physics Letters · 1992 · 130 citations · Full text

, , +17

Atomic level epitaxy of 3C-SiC by low pressure vapour deposition with alternating gas supply

Hiroyuki Nagasawa, Yuta Yamaguchi · Thin Solid Films · 1993 · 68 citations

, , +16

SiC mask membrane for synchrotron radiation lithography

Masaaki Kobayashi, Mitsuru Sugawara, Kazuhide Yamashiro et al. · Microelectronic Engineering · 1990 · 17 citations

, , +9

Properties Of SiC Film As X-Ray Mask Membrane

Yoh-ichi Yamaguchi, Norimichi Annaka, Tsutomu Shoki et al. · MRS Proceedings · 1993 · 11 citations

, , +10