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Optimization of aluminum-doped zinc oxide films deposited at low temperature by radio-frequency sputtering on flexible substrates for solar cell applications

Materials ScienceEngineeringRadio-frequency SputteringOxide ElectronicsApplied PhysicsAluminum-doped ZincPlasmon-enhanced PhotovoltaicsThin FilmsChemical Vapor DepositionPhotovoltaicsThin Film ProcessingLow Temperature