IEEE Transactions on Nuclear Science · 2007 · 18 citations · 12 references
EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsRadiation MeasurementAbsorbed DoseLow-dose Radiation EffectsMems CharacterizationMems DesignMems TestingRadiation Dose MeasurementMicrodosimetryTotal Ionizing Dose Effects
Total ionizing dose (TID) measurements at low temperature (60 K) of a micro-electro-mechanical system (MEMS) microshutter array (MSA) indicate that exposing the MSA to ionizing radiation causes some of the shutters to stop operating properly. The number of non-functional shutters depends on the applied bias. With increasing dose, the number of micro-shutters that become non-functional increases.
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The effects of radiation on MEMS accelerometers
A.R. Knudson, S. Büchner, P.T. McDonald et al. · IEEE Transactions on Nuclear Science · 1996 · 78 citations
Engineering, Electrical Engineering, Mechanical Engineering +17