One-dimensional fluid model of ECR discharge with inhomogeneity effects of external magnetic field

Abstract

A one-dimensional fluid model of the microwave electron cyclotron resonance (ECR) discharge, which includes the inhomogeneity effects of the external magnetic field, is developed. We use fluid equations which are obtained from the one-dimensional Bolzmann equation expressed in terms of magnetic moment and parallel velocity. We model the plasma and sheath separately, and appropriate plasma-sheath boundary conditions are utilized. Microwave is represented by an energy flow, and treated by a ray tracing technique. For the argon discharge, we obtain various quantities such as the axial profiles of plasma density, electron temperature, electrostatic potential, fluid velocity, and microwave power deposition. The results of simulation compare well with the experimental observation of the mirror field effects on the plasma parameters.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>