A non-fluorine mold release agent for Ni stamp in nanoimprint process

Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography

Michael D. Austin, Haixiong Ge, Wei Wu et al. · Applied Physics Letters · 2004 · 608 citations

Engineering, Materials Engineering, Materials Science +12

Ultrafast and direct imprint of nanostructures in silicon

Stephen Y. Chou, Chris Keimel, Jian Gu · Nature · 2002 · 466 citations

Engineering, Materials Engineering, Materials Science +12

Fabrication of SU-8 multilayer microstructures based on successive CMOS compatible adhesive bonding and releasing steps

María Agirregabiria, F.J. Blanco, J. Berganzo et al. · Lab on a Chip · 2005 · 138 citations

Engineering, Materials Engineering, Materials Science +17

Effects of nanoimprinted patterns in tissue-culture polystyrene on cell behavior

Walter Hu, Evelyn K. F. Yim, Ronald M. Reano et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 105 citations · Full text

Engineering, Bioengineering, Biomedical Engineering +17

Electronics for single photon avalanche diode arrays

Simone Tisa, Franco Zappa, Alberto Tosi et al. · Sensors and Actuators A Physical · 2007 · 76 citations

Engineering, Electrical Engineering, Materials Science +12