Concepedia

Prediction of Plasma Charging Induced Gate Oxide Tunneling Current and Antenna Dependence by Plasma Charging Probe

Shawming Ma, J.P. McVittie

2005 · 18 citations · 1 references

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Concepts

Natural SciencesElectrical EngineeringPhysicsElectromagneticsPlasma PhysicsSemiconductor DevicesCurrent-voltage CharacteristicsPlasma DiagnosticsPlasma ElectrodynamicsPlasma FundamentalsPlasma TransportPlasma-surface InteractionsAntenna AnalysisAntenna VariationGate Leakage CurrentTunneling CurrentTunneling Phenomena

References

1

Modeling of oxide breakdown from gate charging during resist ashing

S. Fang, Shigemi Murakawa, J.P. McVittie · IEEE Transactions on Electron Devices · 1994 · 53 citations

Engineering, Electrical Engineering, Physics +17