Proton Radiation Effects on MEMS Silicon Strain Gauges

D. Marinaro, Phillip McMahon, A Wilson

IEEE Transactions on Nuclear Science · 2008 · 20 citations · 9 references

Concepts

Abstract

A microelectromechanical system (MEMS) strain gauge constructed from single-crystalline silicon has been developed for application in aircraft structural-health-monitoring. The effects of proton irradiation on the piezoresistive elements of the silicon strain gauges are examined. Degradation in the piezoresistive response at applied strains above 2000 microstrain is observed.

References

9