Performance of Fabry–Perot microcavity structures with corrugated diaphragms

The tension of metallic films deposited by electrolysis

G. Stoney · Proceedings of the Royal Society of London Series A Containing Papers of a Mathematical and Physical Character · 1909 · 4.8K citations · Full text

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Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

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The design, fabrication, and testing of corrugated silicon nitride diaphragms

P.R. Scheeper, Wouter Olthuis, P. Bergveld · Journal of Microelectromechanical Systems · 1994 · 131 citations · Full text

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Novel microstructures for the <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> measurement of mechanical properties of thin films

Mehran Mehregany, Roger T. Howe, S.D. Senturia · Journal of Applied Physics · 1987 · 96 citations

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Internal stress compensation and scaling in ultrasensitive silicon pressure sensors

S.T. Cho, K. Najafi, K.D. Wise · IEEE Transactions on Electron Devices · 1992 · 71 citations

Engineering, Materials Engineering, Materials Science +17