Analysis of the effective reflectance of digital micromirror devices and process parameters for maskless photolithography

Emerging digital micromirror device (DMD) applications

Dana Dudley, W. M. Duncan, John Slaughter · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 504 citations

Engineering, Biomedical Engineering, Digital Imaging +12

SLM-based maskless lithography for TFT-LCD

Kwang-Ryul Kim, Junsin Yi, Sung-Hak Cho et al. · Applied Surface Science · 2009 · 51 citations

Engineering, Electrical Engineering, Materials Engineering +8

DMD diffraction measurements to support design of projectors for test and evaluation of multispectral and hyperspectral imaging sensors

Joseph P. Rice, Jorge Neira, Michael Kehoe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 47 citations

Natural Sciences, Vision Science, Optics +16

<title>Display system architectures for digital micromirror device (DMD)-based projectors</title>

James M. Florence, Lars A. Yoder · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 32 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +9

High index 193 nm immersion lithography: the beginning or the end of the road

Paul Zimmerman, Bryan J. Rice, Emil C. Piscani et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 19 citations · Full text

Engineering, Materials Engineering, Materials Science +10