Multilayer structures induced by plasma and laser beam treatments on a-Si:H and a-SiC:H thin films

B. Mitu, Gheorghe Dinescu, M. Dinescu, Aldo Ferrari, M. Balucani, G. Lamedica, A.P. Dementjev

Thin Solid Films · 2001 · 25 citations · 12 references

Concepts

References

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