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Multilayer structures induced by plasma and laser beam treatments on a-Si:H and a-SiC:H thin films

Materials ScienceEngineeringPhysicsSurface ScienceApplied PhysicsLaser Beam TreatmentsPulsed Laser DepositionSemiconductor Device FabricationThin FilmsMultilayer StructuresH Thin FilmsPlasma ProcessingSilicon On InsulatorThin Film Processing