Formation of ultra-thin PtSi layers with a 2-step silicidation process

Kinetics and mechanism of platinum silicide formation on silicon

J. M. Poate, T. C. Tisone · Applied Physics Letters · 1974 · 161 citations

Engineering, Chemistry, Materials Science +16

Platinum silicide formation under ultrahigh vacuum and controlled impurity ambients

C. A. Crider, J. M. Poate, J. E. Rowe et al. · Journal of Applied Physics · 1981 · 85 citations

Engineering, Materials Engineering, Materials Science +17

Reliability and degradation : semiconductor devices and circuits

M.J. Howes, D. V. Morgan · 1981 · 82 citations

Engineering, Electrical Engineering, Materials Science +12

Platinum silicide formation using rapid thermal processing

A. Naem · Journal of Applied Physics · 1988 · 51 citations

Engineering, Materials Engineering, Materials Science +17

Kinetics of platinum silicide formation during rapid thermal processing

Arun K. Pant, S. P. Murarka, C. Shepard et al. · Journal of Applied Physics · 1992 · 43 citations

Natural Sciences, Materials Engineering, Materials Science +17