Growth characteristics of SiC in a hot-wall CVD reactor with rotation - Concepedia

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Growth characteristics of SiC in a hot-wall CVD reactor with rotation

14

Citations

7

References

2002

Year

J. Zhang, Urban Forsberg, M. Isacson, A. Ellison, Anne Henry, Olof Kordina, Erik Janzén

Journal of Crystal Growth

Growth CharacteristicsElectrical EngineeringEngineeringHot-wall Cvd ReactorFusion Reactor MaterialNuclear ReactorsCarbide

References

	Year	Citations

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