CMOS biosensor platform

Abstract

The detection principle, process integration and system architecture of a novel 90-nm CMOS-based mixed-signal capacitive biosensor with 256 × 256 densely packed nano-electrodes are presented. The sensor operates at modulation frequencies up to 200 MHz, and has on-chip temperature sensors, A/D converters and digital I/O. Brownian motion of nanobeads over the sensor surface has been recorded in real time. The biosensor principle has been validated with a biological test assay. The sensor provides a versatile platform for a multitude of novel multiplexed biosensing applications with enhanced performance by digital control and statistical data analysis.