CMOS DNA Sensor Array With Integrated A/D Conversion Based on Label-Free Capacitance Measurement

Abstract

This paper presents a fully electronic label-free DNA chip in 0.5-mum CMOS technology, with 5-V supply voltage, suitable for low-cost highly integrated applications. The chip features an array of 128 sensor sites with gold electrodes and integrated measurement, conditioning, multiplexing and analog-to-digital conversion circuitry. The circuits measure capacitance variations due to DNA hybridization on the gold electrodes which are bio-modified by covalently attaching probes of known sequence. Specificity, repeatability and parallel detection capability of the fabricated chip are successfully demonstrated