Investigation of the electrochemical behavior of indium nitride thin films by plasma-assisted reactive evaporation

Vattikondala Ganesh, Mahdi Alizadeh, Alagarsamy Pandikumar, Boon Tong Goh, Nay Ming Huang, Saadah Abdul Rahman

RSC Advances · 2015 · 30 citations · 40 references

Concepts

Abstract

Indium nitride thin films were grown at different RF powers using a plasma-assisted reactive evaporation method and their electrochemical properties were investigated.

References

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