Low-Temperature, Strong SiO2-SiO2 Covalent Wafer Bonding for III–V Compound Semiconductors-to-Silicon Photonic Integrated Circuits

Electrically pumped hybrid AlGaInAs-silicon evanescent laser

Alexander W. Fang, Hyundai Park, Oded Cohen et al. · Optics Express · 2006 · 1.2K citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Bonding of silicon wafers for silicon-on-insulator

W. Maszara, Georges Goetz, A.L. Caviglia et al. · Journal of Applied Physics · 1988 · 861 citations

Engineering, Materials Engineering, Materials Science +17

SEMICONDUCTOR WAFER BONDING

U. Gösele, Qiaoling Tong · Annual Review of Materials Science · 1998 · 594 citations

Engineering, Materials Engineering, Materials Science +17

Hybrid silicon evanescent laser fabricated with a silicon waveguide and III-V offset quantum wells

Hyundai Park, Alexander W. Fang, Satoshi Kodama et al. · Optics Express · 2005 · 252 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Plasma-assisted InP-to-Si low temperature wafer bonding

D. M. Pasquariello, Klas Hjort · IEEE Journal of Selected Topics in Quantum Electronics · 2002 · 244 citations

Engineering, Materials Engineering, Materials Science +17