The effect of alcohol additives on etching characteristics in KOH solutions

Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration

Kazuo Sato, Mitsuhiro Shikida, Yoshihiro Matsushima et al. · Sensors and Actuators A Physical · 1998 · 321 citations

Engineering, Materials Engineering, Materials Science +12

The effect of isopropyl alcohol on etching rate and roughness of (1 0 0) Si surface etched in KOH and TMAH solutions

Irena Zubel, M. Kramkowska · Sensors and Actuators A Physical · 2001 · 215 citations

Engineering, Materials Engineering, Materials Science +16

Silicon anisotropic etching in alkaline solutions IV

Irena Zubel, Irena Barycka, Kamilla Kotowska et al. · Sensors and Actuators A Physical · 2001 · 120 citations

Engineering, Materials Engineering, Materials Science +11

Inhibition of pyramid formation in the etching of Si p(100) in aqueous potassium hydroxide-isopropanol

S.A. Campbell, Kevin Cooper, Lewis Dixon et al. · Journal of Micromechanics and Microengineering · 1995 · 118 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Silicon anisotropic etching in alkaline solutions III: On the possibility of spatial structures forming in the course of Si(100) anisotropic etching in KOH and KOH+IPA solutions

Irena Zubel · Sensors and Actuators A Physical · 2000 · 93 citations

Natural Sciences, Materials Engineering, Materials Science +12