Silicon anisotropic etching in alkaline solutions III: On the possibility of spatial structures forming in the course of Si(100) anisotropic etching in KOH and KOH+IPA solutions

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H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 1.6K citations

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Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration

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Silicon anisotropic etching in alkaline solutions IV

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Surface Free Energy Model of Silicon Anisotropic Etching

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Engineering, Materials Engineering, Materials Science +17

Silicon anisotropic etching in alkaline solutions I. The geometric description of figures developed under etching Si(100) in various solutions

Irena Zubel, Irena Barycka · Sensors and Actuators A Physical · 1998 · 82 citations

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