Guiding the deposition flux in an ionized magnetron discharge - Concepedia

Concepedia

Publication | Open Access

Guiding the deposition flux in an ionized magnetron discharge

DOI Full Paper Access

100

Citations

14

References

2006

Year

Johan Böhlmark, M. Östbye, Martina Lattemann, H. Ljungcrantz, T. Rosell, Ulf Helmersson

Thin Solid Films

Electrical EngineeringEngineeringPhysicsGlow DischargePlasma ScienceDeposition FluxPlasma PhysicsGas Discharge Plasma

References

	Year	Citations

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