Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 19 citations · 22 references
EngineeringAntiglare FilmHigh-definition DisplayChemistryChemical EngineeringBeam LithographyOptical PropertiesPrinted ElectronicsPhotopolymer NetworkNanolithography MethodUltraviolet IrradiationSurface ModificationUv-vis Spectroscopy3D PrintingNanoimprint LithographyMicrofabricationNanomaterialsNatural SciencesTrehalose Derivatives
Nanopatterning of an ecofriendly antiglare film derived from biomass using an ultraviolet curing nanoimprint lithography is reported. Developed sugar-related organic compounds with liquid glucose and trehalose derivatives derived from biomass produced high-quality imprint images of pillar patterns with a 230-nm diameter. Ecofriendly antiglare film with liquid glucose and trehalose derivatives derived from biomass was indicated to achieve the real refraction index of 1.45 to 1.53 at 350 to 800 nm, low imaginary refractive index of <0.005 and low volumetric shrinkage of 4.8% during ultraviolet irradiation. A distinctive bulky glucose structure in glucose and trehalose derivatives was considered to be effective for minimizing the volumetric shrinkage of resist film during ultraviolet irradiation, in addition to suitable optical properties for high-definition display.
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Estimation of the surface free energy of polymers
D.K. Owens, R. C. Wendt · Journal of Applied Polymer Science · 1969 · 9K citations
Frederick M. Fowkes · The Journal of Physical Chemistry · 1963 · 735 citations
Implementation of an imprint damascene process for interconnect fabrication
Gerard M. Schmid, M. D. Stewart, J. T. Wetzel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 82 citations
Dual Damascene Approach, Engineering, Electron-beam Lithography +18