Concepedia

Spatial Mapping of the Carrier Concentration and Mobility in SiC Wafers by Micro Fourier-Transform Infrared Spectroscopy

Hiroyuki Yaguchi, K. Narita, Yasuto Hijikata, Sadafumi Yoshida, Shin-ichi Nakashima, Naoki Oyanagi

Materials science forum · 2002 · 12 citations · 0 references

Open access