Adhesion forces reduction for micro manipulation based on micro physics

Abstract

Micro manipulation is required for assembling and maintenance of micro machines and their parts. As the handling objects are miniaturized, interactive forces such as van der Waals force, surface tension force and electrostatic force between micro particles and gripper surface become dominant in the air. We cannot neglect such adhesion forces in micro manipulation. We should consider the Micro Physics in controlling and manipulating them. Adhesion forces are estimated and their reduction methods are presented. Based on the proposed reduction methods, we designed and made a prototype of the micro gripper. This paper proposes new handling strategy of the micro objects based on the Micro Physics.