Micro manipulation based on micro physics-strategy based on attractive force reduction and stress measurement

Abstract

Micro manipulation is required for assembling and maintenance works of micro machines and their parts. This paper proposes a handling strategy for micro objects based on micro physics. Attractive forces are modeled and their reduction methods are presented. The authors show experimental results of reducing these forces. Based on the proposed reduction methods, the authors present a new micro manipulation strategy. Grasping of the micro object or press motion is required in some situations, and force information becomes important. The authors propose to use a laser Raman spectrophotometer with single crystal silicon and a strain gauge for the measurement and calibration of the force applied to the micro object. The experimental results of calibrating the force sensing system is presented.