Russian Physics Journal · 2008 · 10 citations · 6 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsDopingEpitaxial GrowthIon ImplantationSemiconductor Crystal GrowthSemiconductor HeterostructuresImplantation Through Thin FilmsImplantation-induced Defect FormationIon Beam IrradiationIon Implantation EffectsMolecular Beam Epitaxy
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