IEEE Electron Device Letters · 2002 · 99 citations · 6 references
EngineeringElectrical EngineeringMaterials ScienceAntennasMicrowave EngineeringSemiconductor DevicesAntenna GainHigh-frequency Semiconductor DevicesIntegrated Circuit DesignMicrowave AntennasMicrowave Integrated CircuitsRadio-frequency Integrated CircuitsAntenna Gain EnhancementAntenna IntegrationChip AntennasHigh-gain AntennasIntegrated AntennasResistivitySilicon Microwave Integrated CircuitsWireless On-chip Interconnects
We have demonstrated the highest transmission gain integrated dipole antenna on Si reported so far, to use as an integrated antenna for the purpose of ULSI on-chip wireless interconnection. A 2-mm long and 10-μm wide dipole antenna pair at a distance of 1 cm shows a transmission gain of -36.5 dB at 18 GHz, which is 20 dB higher than the previously reported gain. This large increase in gain is achieved by proton implantation on the Si substrate, which increased the resistivity from 10 /spl Omega/-cm to 0.1 M/spl Omega/-cm. It is also found that transmission gain can be maximized for a given resistivity by optimizing the Si substrate thickness or by inserting a low-k dielectric layer below the substrate.
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On-chip wireless interconnection with integrated antennas
Kihong Kim, Hyun Yoon, O K.K. · 2002 · 96 citations
Engineering, Computer Engineering, Electrical Engineering +17
Integrated antennas on Si, proton-implanted Si and Si-on-quartz
K.T. Chan, Albert Chin, Yuning Chen et al. · 2002 · 92 citations